Fundamental studies on the thin film deposition of ceramics were carried out for the inner surface of short tubings in order to get high corrosion and erosion resistance. Inner surface of short tubings was coated by multilayer of Al2O3/TiN/TiC by plasma CVD. Conventional evaluation tests were carried out regarding to their erosion and corrosion resistance.

In order to remove the pinholes in the deposited films, the surface roughness of base material was improved by polishing and metal Cr layer was plated.

Subject
Films, Materials, Erosion resistance, Metal surfaces, Tubes, Roughness, Corrosion testing, Plasma, Tubing, Internal surfaces, Weight loss, Erosion, Erosion corrosion
© 1993 Association for Materials Protection and Performance (AMPP). All rights reserved. No part of this publication may be reproduced, stored in a retrieval system, or transmitted, in any form or by any means (electronic, mechanical, photocopying, recording, or otherwise) without the prior written permission of AMPP. Positions and opinions advanced in this work are those of the author(s) and not necessarily those of AMPP. Responsibility for the content of the work lies solely with the author(s).
1993
Association for Materials Protection and Performance (AMPP)
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