The diffusivities of oxygen and sulfur in thermally grown Cr2O3 have been determined by means of electrical conductivity measurements. Electrical conductivity of the oxide at temperatures between 700 and 950°C and PO2 = 10-4 atm decreased owing to doping with a trace amount of sulfur. The measured diffusivity of sulfur in Cr2O3 is at least one to two orders of magnitude higher than that of oxygen. The activation energy for oxygen diffusion is 3.53 eV, whereas the value for sulfur diffusion (0.8 eV) is much lower.

In order to define the hole carrier concentration from electrical-conductivity data, the hole mobility was measured by applying a constant-composition technique. The solubility of sulfur decreased with an increase in temperature, but was almost constant below 800°C.

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