Abstract
The interaction of the environment with electronic equipment and device surfaces will be discussed in the context of the arrival rate and accumulation of corrosive substances at surfaces. These are controlled by: (1) the net influx of pollutants from the outdoor environment; (2) the internal generation of corrosive species; (3) the deposition rate to surfaces; and (4) the reactivity of these substances on and with the surfaces. A quantitative methodology for predicting indoor accumulation rates of ionic substances from outdoor concentrations will be illustrated. The methodology is based on studies at electronic equipment rooms across the United States but its usefulness is not limited to these environments. It can also be applied to surfaces of equipment being manufactured in factory environments, and to surfaces of integrated circuits as they are being processed in a clean room environment.